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Environmental safety issues for semiconductors (research on scarce materials recycling)

TitleEnvironmental safety issues for semiconductors (research on scarce materials recycling)
Publication TypeJournal Article
Year of Publication2004
AuthorsIzumi S
Journal TitleThin Film Solids
Volume461
Pages7-12
KeywordsArsenic, Gallium, Oxides, recycling
AbstractIn the 21st century, in the fabrication of various industrial parts, particularly, current and future electronics devices in the semiconductorindustry, environmental safety issues should be carefully considered. We coined a new term, environmental safety issues for semiconductors,considering our semiconductor research and technology which include environmental and ecological factors. The main object of this analysisis to address the present situation of environmental safety problems in the semiconductor industry; some of which are: (1) the generation anduse of hazardous toxic gases in the crystal growth procedure such as molecular beam epitaxy (MBE) and metalorganic chemical vapordeposition (MOCVD), (2) the generation of industrial toxic wastes in the semiconductor process and (3) scarce materials recycling fromwastes in the MBE and MOCVD growth procedure.
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